Archive named Z87-DELUXE, the Asus flagship Intel Z87 ATX motherboard designation; no revision or file type is stated. Roughly 560 KB suggests boardview or service layout data rather than firmware. Extract it and open the contained file in a suitable viewer to locate components, check net connectivity and find measurement points around VRM, chipset or slots. Before using the layout to trace a fault, compare the revision printed on the board with the one inside the archive, since revisions can differ.
The button opens the matching file on RM Schematics, or a source page if it is not catalogued there yet. The original attachment is from @boardview. Enginerys does not host this file.
How to open a .rar file
Compressed archive — the usual wrapper for a schematic + boardview pair or a BIOS + EC set.